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Title:
PHOTOSENSITIVE RESIN LAMINATE
Document Type and Number:
Japanese Patent JP2011108887
Kind Code:
A
Abstract:

To provide a photosensitive resin laminate excellent in adhesion and fine pattern formation.

The photosensitive resin laminate includes a substrate 11, an etching layer 12 having a lamination of a metal compound layer 14 provided on the substrate 11 and an SiO2 layer 15 provided on the metal compound layer 14, and a resist layer 13 provided on the etching layer 12 and including a cation-curable resin composition. The cation-curable resin composition includes at least one type of cation-curable monomer selected from the group of an epoxy compound, oxetane compound and vinyl ether compound, a fluorine-containing cation-curable monomer, and a photoacid generator. The content of the fluorine-containing cation-curable monomer is 10-50 pts.wt. of the whole solid content of the cation-curable resin composition.


Inventors:
YONEDA HISANARI
Application Number:
JP2009263114A
Publication Date:
June 02, 2011
Filing Date:
November 18, 2009
Export Citation:
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Assignee:
ASAHI KASEI CORP
International Classes:
H01L21/027; B29C59/04; B32B7/02; B32B9/00; C08G65/22; G02B5/30
Domestic Patent References:
JP2008189821A2008-08-21
JP2009191172A2009-08-27
JP2004195776A2004-07-15
JP2010503995A2010-02-04
JP2009145742A2009-07-02
Foreign References:
WO2007037276A12007-04-05
WO2008126313A12008-10-23
Attorney, Agent or Firm:
Hiroyoshi Aoki