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Title:
圧電駆動型MEMSアクチュエータ
Document Type and Number:
Japanese Patent JP4834443
Kind Code:
B2
Abstract:
A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

Inventors:
Toshihiko Nishigaki
Toshihiko Nagano
Takashi Miyazaki
Kazuhiko Itaya
Takashi Kawakubo
Application Number:
JP2006098556A
Publication Date:
December 14, 2011
Filing Date:
March 31, 2006
Export Citation:
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Assignee:
Toshiba Corporation
International Classes:
H01L41/09; B81B3/00; H01H57/00; H02N2/00
Domestic Patent References:
JP50134168A
JP62045824U
JP2006087231A
JP6111971A
JP10189393A
JP6150405A
JP2002373829A
Foreign References:
WO2005059933A1
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki



 
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