To provide an MEMS switch which assures a sure switching on and off operation and is superior in high-frequency response and has high reliability.
The piezoelectric MEMS switch (10) includes a diaphragm (20) which is arranged opposed to a base board (12) through a gap (24), a first piezoelectric drive part (30) which has a first lower electrode (32), a first piezoelectric body (34), and a second upper electrode (36) formed in lamination on a first surface (20A) of the diaphragm (20), a second piezoelectric drive part (40) which has a second lower electrode (42), a second piezoelectric body (44), and a second upper electrode (46) formed in lamination on a second surface (20B) of the diaphragm (20), a fixed electrode (14) installed on the gap (24) side of the base board (12), and a movable electrode (18) which is installed on the diaphragm (20) opposed to the fixed electrode (14) and contacts and separates from the fixed electrode (14) accompanying displacement of the diaphragm (20).
WO/2022/153697 | MEMS SWITCH AND MANUFACTURING METHOD FOR MEMS SWITCH |
JP2006515953A | 2006-06-08 | |||
JP2003179085A | 2003-06-27 | |||
JPS59109166U | 1984-07-23 | |||
JPS61156618A | 1986-07-16 | |||
JP2006221956A | 2006-08-24 | |||
JP2006515953A | 2006-06-08 | |||
JP2003179085A | 2003-06-27 | |||
JPS59109166U | 1984-07-23 |