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Title:
PIEZOELECTRIC ACTUATOR ELEMENT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2005160180
Kind Code:
A
Abstract:

To solve the following problem in conjunction with increase in the density of magnetic disk units: a piezoelectric actuator element comprises a pair of separated units, and the respective ends are coupled with each other by a flexible resin layer; the left and right piezoelectric thin film units deform and the resonance characteristics are degraded; and the operation of the magnetic disk unit is influenced.

One ends of a first piezoelectric element unit 10a and a second piezoelectric element unit 10b separated to left and right are coupled with each other by a reinforcing member (19 or 30c), and a beam piece is provided. Thus, deformation in the first piezoelectric element unit 10a and the second piezoelectric element unit 10b can be suppressed. As a result, the piezoelectric actuator element 10 can be uniformly bonded to a flexure 7 in a head support mechanism 100, and stable resonance characteristics can be obtained. Further, breakage due to deformation can be prevented, and high reliability can be ensured.


Inventors:
OGAWA HIROKO
UCHIYAMA HIROICHI
Application Number:
JP2003393602A
Publication Date:
June 16, 2005
Filing Date:
November 25, 2003
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G11B5/596; G11B21/10; G11B21/21; H01L41/083; H01L41/09; H01L41/22; H01L41/29; H01L41/313; H02N2/00; (IPC1-7): H02N2/00; G11B5/596; G11B21/10; G11B21/21; H01L41/083; H01L41/09; H01L41/22
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito