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Title:
PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC ACTUATOR MANUFACTURING METHOD, AND ITS DEVICE
Document Type and Number:
Japanese Patent JP2005253277
Kind Code:
A
Abstract:

To provide a piezoelectric actuator that can well vibrate and that is highly durable, a piezoelectric actuator manufacturing method, and its device.

The piezoelectric actuator 5 is provided with a vibrating body 50 that has a vibrating member comprising a vibrating portion main unit and a contact 515 that protrudes from a part of the vibrating portion main unit in a prescribed direction and contacts a moving body, and piezoelectric elements 52 that are fixed to the vibrating member. Power is transmitted by the vibrations of the piezoelectric elements 52 to the moving body via the contact 515 so that the moving body is moved. A ceramic layer 59 is provided on a part that contacts at least the moving body of the contact 515.


Inventors:
MIYAO NOBUYUKI
Application Number:
JP2004064801A
Publication Date:
September 15, 2005
Filing Date:
March 08, 2004
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; H01L41/08; H01L41/18; H01L41/187; H01L41/193; H01L41/22; H01L41/313; H02N2/00; (IPC1-7): H02N2/00; H01L41/08; H01L41/09; H01L41/18; H01L41/187; H01L41/193; H01L41/22
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi