To reduce an increase in Q value of a varicap, or transmission loss of a switch in a piezoelectric driving type MEMS (Micro-electro-mechanical System) element.
The piezoelectric driving type MEMS element includes: a substrate; a fixed portion fixing one end of a beam onto the substrate to hold at least a portion of the beam with a gap above the substrate; the beam having a lower electrode film, a lower piezoelectric film formed on the lower electrode film, a middle electrode film formed on the lower piezoelectric film, an upper piezoelectric film formed on the middle electrode film, and an upper electrode film formed on the upper piezoelectric film; a power source portion applying a voltage among the lower electrode film, upper electrode film, and middle electrode film of the beam; and fixed electrode arranged at the end of the beam on the opposite side from the fixed portion and on the substrate constituting an electric circuit. Any one or two electrode films of the lower electrode film, the middle electrode film and the upper electrode film are thicker than the other electrode thereof.
NAGANO TOSHIHIKO
ONO HIROSHI
KAWAKUBO TAKASHI
JP2007259669A | 2007-10-04 | |||
JP2008091167A | 2008-04-17 | |||
JP2005217852A | 2005-08-11 | |||
JPH02260108A | 1990-10-22 | |||
JP2008005642A | 2008-01-10 |
Tetsuma Ikegami
Akira Sudo