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Title:
PIEZOELECTRIC DRIVING TYPE MEMS ELEMENT
Document Type and Number:
Japanese Patent JP2010238737
Kind Code:
A
Abstract:

To reduce an increase in Q value of a varicap, or transmission loss of a switch in a piezoelectric driving type MEMS (Micro-electro-mechanical System) element.

The piezoelectric driving type MEMS element includes: a substrate; a fixed portion fixing one end of a beam onto the substrate to hold at least a portion of the beam with a gap above the substrate; the beam having a lower electrode film, a lower piezoelectric film formed on the lower electrode film, a middle electrode film formed on the lower piezoelectric film, an upper piezoelectric film formed on the middle electrode film, and an upper electrode film formed on the upper piezoelectric film; a power source portion applying a voltage among the lower electrode film, upper electrode film, and middle electrode film of the beam; and fixed electrode arranged at the end of the beam on the opposite side from the fixed portion and on the substrate constituting an electric circuit. Any one or two electrode films of the lower electrode film, the middle electrode film and the upper electrode film are thicker than the other electrode thereof.


Inventors:
NISHIGAKI MICHIHIKO
NAGANO TOSHIHIKO
ONO HIROSHI
KAWAKUBO TAKASHI
Application Number:
JP2009082270A
Publication Date:
October 21, 2010
Filing Date:
March 30, 2009
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01G5/16; B81B3/00; H01H57/00
Domestic Patent References:
JP2007259669A2007-10-04
JP2008091167A2008-04-17
JP2005217852A2005-08-11
JPH02260108A1990-10-22
JP2008005642A2008-01-10
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami
Akira Sudo