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Patent Searching and Data


Title:
PLASMA SYSTEM
Document Type and Number:
Japanese Patent JP2010189731
Kind Code:
A
Abstract:

To provide a plasma system where assembling/disassembling can be more easily performed.

At least a part of a waveguide is composed of a coaxial cable 12 and coaxial waveguide converters 11, 13 provided on both the edges of the coaxial cable 12. In this way, waveguide tubes to be used for the waveguide can be reduced, thus, upon assembling/disassembling, attachment and detachment of many bolts and nuts which have been performed conventionally are made unnecessary. As a result, the assembling/disassembling can be more easily performed. Further, since the coaxial cable 12 is flexible, the conventional problem on strain can be solved, and the assembling can be more easily performed.


Inventors:
AKAZAWA MASAYOSHI
Application Number:
JP2009036546A
Publication Date:
September 02, 2010
Filing Date:
February 19, 2009
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
C23C14/35; C23C16/511; H01L21/31; H05H1/46
Domestic Patent References:
JPH04276067A1992-10-01
JP2006089846A2006-04-06
JPH04276067A1992-10-01
Foreign References:
WO2004092443A12004-10-28
Attorney, Agent or Firm:
Masaki Yamakawa
Hiroro Kurokawa
Shigeki Yamakawa