To provide a plasma treatment device which can simplify the cleaning of a plasma generating electrode on which an overhaul and cleaning are applied by solving the problem that there is such a case that working load becomes large at the overhaul, and the overhaul is not recommendable when cleaning the plasma generating electrode, and simple sandblast treatment generates many scratches on the plasma generating electrode which causes arc discharge, and cleaning using a chemical agent damages the electrode material itself and is accompanied by a personal risk like a burn injury caused by a chemical agent.
On the plasma treatment device comprising a plasma generating electrode 1 having a vertical part at a peripheral part and a base material supporting body 4 facing each other, the gap between the plasma generating electrode 1 and the base material supporting body 4 is made variable.
FUKUGAMI YOSHISUE
ISHII RYOJI
NAKAJIMA TAKAYUKI
SASAKI NOBORU
SUZUKI HIROSHI
