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Patent Searching and Data


Title:
PLATING INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2001228099
Kind Code:
A
Abstract:

To discriminate with high accuracy as to whether plating is applied from a monochromatic image.

A substrate and a plated metal are irradiated with a light of a specific wavelength which is different by a large amount in reflectivity from other wavelength region to obtain a monochromatic image, based on the light having a specific wavelength, and the monochromatic image is converted into a binary image to discriminate between the plated metal and the substrate.


Inventors:
HAGA TAKAYUKI
Application Number:
JP2000039256A
Publication Date:
August 24, 2001
Filing Date:
February 17, 2000
Export Citation:
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Assignee:
KOKUSAI GIJUTSU KAIHATSU KK
International Classes:
G01N21/956; C25D5/02; C25D21/12; G01N21/27; G01N33/20; H01L23/12; (IPC1-7): G01N21/956; C25D5/02; C25D21/12; G01N21/27; G01N33/20
Attorney, Agent or Firm:
Yuichi Murakami (1 outside)