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Title:
PNEUMATIC LIQUID SUPPLY DEVICE
Document Type and Number:
Japanese Patent JPH11257236
Kind Code:
A
Abstract:

To prevent the liquid that flows back into an air supply pipeline via a pump from causing damage, stalls and the like to an air pressure regulating means.

This pneumatic liquid supply device comprises a circulating pump 26 or a quantitative pump 34 for feeding liquid such as washings and chemicals to a washing tank 20, solenoid selectors 51A and 51B and regulators 52A to 52C that constitute respective air pressure regulating means 50 connected to an air supply source 60, and air supply pipelines 41a, 41b, 41d and 41e for connecting the air pressure regulating means 50 to the circulating pump 26 or quantitative pump 34. In each air supply pipeline 41a, 41b, 41d, 41e that connects its associated air pressure regulating means 50 to the circulating pump 26 or quantitative pump 34, a leak sensor 70 is disposed to detect any liquid flowing back into the air supply pipeline 41a, 41b, 41d, 41e via the circulating pump 26 or quantitative pump 34.


Inventors:
TANAKA YUJI
NAGANO YASUHIRO
TERADA SHOJI
NAKAJIMA SATOSHI
Application Number:
JP1998000088048
Publication Date:
September 21, 1999
Filing Date:
March 17, 1998
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F04B49/00; F04B9/12; F04B9/137; (IPC1-7): F04B49/00; F04B9/12
Attorney, Agent or Firm:
中本 菊彦



 
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