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Patent Searching and Data


Title:
POLISHING DEVICE FOR PLANE
Document Type and Number:
Japanese Patent JPH0259265
Kind Code:
A
Abstract:

PURPOSE: To reduce an energy consumption with the structure being simplified by executing the lift and inversion of a pressurizing head by a single cylinder.

CONSTITUTION: When a work 12 is fitted to a pressurizing head 8, a probe 16 is guided toward a straight line part 14a from a cam curving part 14b according to the extension of a piston rod 7. A cylinder 5 is turned in the vertical direction, the pressurizing head 8 which was in a reversal state is also turned to the lower part with changing its direction downward gradually and when the probe 16 reaches the straight line part 14a, the head 8 becomes in a completely downward state and the work 12 is taken at the pressurizing position press-fitting to a surface plate 2. When polishing is completed and the piston rod 7 is contracted, the probe 16 is guided inside a cam groove 14 reversely. The head 8 is turned to the upper part with changing its direction in the reversal direction gradually and displaced to the inversion position.


Inventors:
NAGAO KATSUNORI
Application Number:
JP1988000210950
Publication Date:
February 28, 1990
Filing Date:
August 25, 1988
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/04; B24B37/30; (IPC1-7): B24B37/04