Title:
POLISHING LEVEL BLOCK, AND POLISHING DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JPH09262758
Kind Code:
A
Abstract:
To prevent the surface of a polishing level block from being damaged when a polishing cloth is broken in the polishing level block of polishing cloth sucking and fixing.
A level block protective plate 3 which transmits the vacuum suction force to a polishing cloth 4 through, e.g. a hole 13, and is held by a level block body 2 by the vacuum suction force to the polishing cloth 4, is interposed between the level block body 2 which is connected to a driving part of a polishing device and is provided with a suction hole 6 on an upper surface 2a side and the polishing cloth 4 to be held through the vacuum suction to the upper surface 2a side of the level block body 2. The polishing device is provided with the polishing level block 1.
Inventors:
NISHIMURA TAKANOBU
Application Number:
JP7388296A
Publication Date:
October 07, 1997
Filing Date:
March 28, 1996
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B24B37/12; B24B37/27; B24B37/28; (IPC1-7): B24B37/04
Attorney, Agent or Firm:
Suyama Saichi
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