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Title:
POLISHING MEMBER
Document Type and Number:
Japanese Patent JP2008168430
Kind Code:
A
Abstract:

To provide a polishing member restraining roll-off by always realizing a condition that an end edge of a polished member intersects with an edge part of a groove of a poslishing member diagonally at an appropriate angle when the end edge slides in contact with the edge part.

This polishing member has a polishing face rotated around an axis along a perspective direction relative to a polished material. A plurality of grooves 3 for fluidizing polishing slurry outward in a face direction from a rotation center side are formed on the polishing face along a reference curve L. The reference curve L is set to such a curve that a cross angle 0 of a tangent A at a given point on the curve and a straight line B passing through the given point and the rotation centers of the polishing face becomes constant.


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Inventors:
KATO HIROKI
NISHIDA YOSHIKAZU
Application Number:
JP2008010195A
Publication Date:
July 24, 2008
Filing Date:
January 21, 2008
Export Citation:
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Assignee:
NITTA HAAS INC
International Classes:
B24B37/26; H01L21/304
Domestic Patent References:
JP2001291687A2001-10-19
JP2001138212A2001-05-22
Attorney, Agent or Firm:
Kazuhide Okada



 
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