To provide a polishing member restraining roll-off by always realizing a condition that an end edge of a polished member intersects with an edge part of a groove of a poslishing member diagonally at an appropriate angle when the end edge slides in contact with the edge part.
This polishing member has a polishing face rotated around an axis along a perspective direction relative to a polished material. A plurality of grooves 3 for fluidizing polishing slurry outward in a face direction from a rotation center side are formed on the polishing face along a reference curve L. The reference curve L is set to such a curve that a cross angle 0 of a tangent A at a given point on the curve and a straight line B passing through the given point and the rotation centers of the polishing face becomes constant.
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NISHIDA YOSHIKAZU
JP2001291687A | 2001-10-19 | |||
JP2001138212A | 2001-05-22 |