Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POLISHING METHOD AND POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2002103202
Kind Code:
A
Abstract:

To effectively use an abrasive cloth and prolong a life of a dresser by dispensing with or restraining to be minimal an initial dress, and to perform precise working.

When the abrasive cloth 13 is replaced with a new cloth, a conversion factor for converting an integral value of a rotation torque of a surface plate 12 at working into a working amount is initially set by a trial working of a first workpiece, the integral value is found at working, and working of following workpieces are performed such that a target working amount found using the integral value and the conversion factor is achieved. The working amount by such a working is measured, and when the measured working amount is deviated from an allowable value of the target working amount, the conversion factor is corrected while taking a difference between both working amounts into consideration.


Inventors:
KAWAMO TAKAHIRO
Application Number:
JP2000000295388
Publication Date:
April 09, 2002
Filing Date:
September 28, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOSHIBA MACHINE CO LTD
International Classes:
B24B49/16; B24B53/017; B24B53/02; H01L21/304; (IPC1-7): B24B37/00; B24B49/16; B24B53/02; H01L21/304