PURPOSE: To obtain a polymerized phthalocyanine derivative excellent in properties as semiconductor and useful for improved MSM or MIS elements, by irradiating vapor of a specified phthalocyanine derivative with high-frequency waves and spontaneously polymerizing the formed active species.

CONSTITUTION: A polymerized phthalocyanine derivatives obtained by spontaneously polymerizing active species formed by irradiating vapor of a phthalocyanine derivative of the formula (wherein R is H, a halogen or an alkoxy derived from a 5C or lower linear or branched hydrocarbon, Me is H2, Mg, a transition metal ion, and the position of substitution of R is 5 or 6 in the isoindolin group of the formula). This polymerized phthalocyanine derivative has excellent properties as semiconductor, and an MSM or MIS element containing same as a semiconductor layer is excellent in rectification characteristics and diode characteristics and is not broken by a large current ≥several hundreds mA/cm2 or an applied voltage of ±10V.