PURPOSE: To dampen the instable vibration of a rotary body by mounting a displacement sensor and an electromagnet on two control shafts perpendicular to the rotary body and sending the signal from the displacement sensor to a control circuit to give the rotary body the instable vibration dampening force.
CONSTITUTION: The rotary body 2 of a motor is held with two magnetic bearings 112 and 113, on and under which non-contact sensors 114 and 115 are placed. The rotary body 1 has four control shafts on two X and Y planes perpendicular to a turning axis Z, and displacement sensors 2, 3, 13 and 14 are put on those control shafts. In such constitution, the output from a detecting circuit to which differential signals are sent from the displacement sensors 2 and 3 on the X axis is decomposed into a low frequency component band and high frequency component band, and then adjusted for gain. The signal from a gain adjustor is applied to an electromagnet 10 on the X-axis plane, whereby offering the dampening force necessary for the control in the direction of the X-axis.
Watanabe, Kazuhide
Nakajima, Atsushi
Murakami, Tsutomu
EBARA RES CO LTD
EBARA CORP