To provide a heating element radiating heat uniformly in an operation temperature and free from stress.
This heating element is equipped with a continuous planar strip body and a plurality of mounting elements. A passage from a first end part to a second end part of the continuous strip body is meandering, and is formed with a plurality of repeated cycles. Respective repeated cycles have a plurality of first linear parts, a plurality of second linear parts, and a plurality of rounded parts. The length of the first linear parts is longer than that of the second linear parts, and the total angle of one cycle in the meandering passage is larger than 360°. This heating element can be assembled in a heater assembly for a semiconductor treating device, for example.
Jun Tsuruta
Tetsuro Shimada
Yoryo Mihashi
Shinji Mitsuhashi
Koichi Ito
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