Title:
PRELIMINARY WORKING APPARATUS, WORKING APPARATUS AND WORKED CONDITION DETECTION DEVICE
Document Type and Number:
Japanese Patent JP2019206074
Kind Code:
A
Abstract:
To provide a preliminary working apparatus, a working apparatus and a worked condition detection device each of which working failure such as chipping leading to defect to be detected in real time and with high degree of accuracy.SOLUTION: Machining mark change data 34 related to a machining mark is created from imaging data of the machining mark imaged with a camera 30. A vibration sensor 40 detects vibration during working of a workpiece 10 by a discoidal grindstone 4. Vibration change data 44 related to temporal change in vibration, is created from primary data 42 related to vibration detected by the vibration sensor 40. The machining mark change data 34 and vibration change data 44 are compared with each other. The machining mark change data 34 such as chipping leading to defect is associated with vibration change data 44, whereby the machining mark being failure corresponding to chipping and so son leading to defect can be determined from vibration change data 44.SELECTED DRAWING: Figure 3
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Inventors:
DOI TAKASHI
KITAMURA TOMOKO
NONAKA ATSUHIRO
SANKARUP DAYAL
SHEKHAR HEMARF
KITAMURA TOMOKO
NONAKA ATSUHIRO
SANKARUP DAYAL
SHEKHAR HEMARF
Application Number:
JP2019095973A
Publication Date:
December 05, 2019
Filing Date:
May 22, 2019
Export Citation:
Assignee:
TDK CORP
International Classes:
B23Q17/09; B23Q17/12; B23Q17/24; B24B27/06; B24B49/10; B24B49/12; H01L21/301
Domestic Patent References:
| JP2011101908A | 2011-05-26 | |||
| JP2018078145A | 2018-05-17 | |||
| JPH03236260A | 1991-10-22 | |||
| JP2018054587A | 2018-04-05 | |||
| JPH08122142A | 1996-05-17 | |||
| JP2000252240A | 2000-09-14 | |||
| JP2016219756A | 2016-12-22 | |||
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Foreign References:
| US20060188351A1 | 2006-08-24 |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation