Title:
PROBE POSITION ALIGNING DEVICE
Document Type and Number:
Japanese Patent JP2020071219
Kind Code:
A
Abstract:
To provide a probe position aligning device which can improve the accuracy of probe position alignment and reduce the complexity of calculation in image analysis.SOLUTION: The probe position aligning device comprises: a spectroscopic element which is provided between a measurement waiting object and a probe element and composed of two translucent prisms each exhibiting a triangular shape and having a first light emission face, a second light emission face and a light incidence face, the first and second light emission faces respectively facing the probe element and the measurement waiting object, the joint face of the two prisms constituting a semi-light permeable reflection face, thus a beam of light passing through the light incidence face being reflected on the reflection face and entering the probe element; an image sensing device provided on the light incidence face of the spectroscopic element; and a light reflection element provided on the side of the spectroscopic element that is opposite the light incidence face, in which the beam of light partly passing through the reflection face is reflected by the light reflection element and returned to the reflection face and then projected to the measurement waiting object.SELECTED DRAWING: Figure 2
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Inventors:
WANG YU YEN
LIN JIA HONG
WENG SSU YUAN
HUANG KUO WEI
LIN JIA HONG
WENG SSU YUAN
HUANG KUO WEI
Application Number:
JP2019172635A
Publication Date:
May 07, 2020
Filing Date:
September 24, 2019
Export Citation:
Assignee:
CHROMA ATE INC
International Classes:
G01R31/28; G01R31/26; H01L21/66
Domestic Patent References:
| JPH05326675A | 1993-12-10 | |||
| JPH1010197A | 1998-01-16 | |||
| JPH10321686A | 1998-12-04 | |||
| JP2002014145A | 2002-01-18 |
Foreign References:
| US20030142861A1 | 2003-07-31 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation