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Patent Searching and Data


Title:
PROBING APPARATUS FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS6262536
Kind Code:
A
Abstract:

PURPOSE: To measure by a microscope while confirming a measuring unit by moving a contacting needle and the microscope in three directions.

CONSTITUTION: A wafer 13 with a semiconductor device to be measured is attracted to and held in a wafer holder 12, and low temperature nitrogen gas is injected from a nozzle 14; thus, the surface of the wafer 13 is shut off from the atmosphere to prevent fine dusts from being adhered, and in cooled to the prescribed measuring temperature. Then, a switch of an operation panel 16 or a remote control board is operated while visually confirming a device pattern formed on the wafer 13 thereof a microscope 32 to control motors 24, 28 to move elevationally and laterally the microscope 32 and a contacting probe 31, thereby matching the tip of the probe 31 to the position of a desired terminal to be measured. The probe 31 is moved only in a direction for approaching the surface of the wafer 13 to contact the end with the desired terminal of the device formed on the wafer 13, thereby measuring it. The measurement result is properly displayed on a data display unit 15 through a measuring unit contained in a base 11.


Inventors:
SAKAI TAKAMASA
KONO MOTOHIRO
BABA TAKAYUKI
NAKAGAWA YOSHIYUKI
Application Number:
JP1985000201638
Publication Date:
March 19, 1987
Filing Date:
September 13, 1985
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66