Title:
Processing equipment
Document Type and Number:
Japanese Patent JP6336734
Kind Code:
B2
Inventors:
Shoji Tokunaga
Application Number:
JP2013230846A
Publication Date:
June 06, 2018
Filing Date:
November 07, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B7/04; B24B27/06; H01L21/301; H01L21/304
Domestic Patent References:
| JP60067079A |
Foreign References:
| US20080138989 |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sayaka Hirakawa
Sachiko Okunuki
Sayaka Hirakawa
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