Title:
PRODUCTION OF HIGH YIELD STRENGTH FILM FOR LASER
Document Type and Number:
Japanese Patent JPH01315702
Kind Code:
A
Abstract:
PURPOSE:To produce the high yield strength film for lasers which is greatly improved in damage threshold by subjecting a film for a high-output laser to multiplex irradiation cleaning after formation of said film on an optical substrate, thereby improving the yield strength to the laser. CONSTITUTION:The laser film for high output formed by a vacuum deposition method or the like on the optical film is heat-treated in an oxygen atmosphere for a specified period of time at a high temp. above the temp. at the time of the film formation and is first subjected to the multiple irradiation of the laser light in the same position of the part on the substrate where the film is formed and which is not to be used. This multiplex irradiation is executed by gradually increasing the fluence of the respective irradiations (shots) from the value below the previously measured damage threshold of the film when the film is untreated. The entire surface on the substrate is then subjected to the multiplex irradiation by gradually increasing the fluence of the respective shots up to just before the damage energy density of the damage threshold is attained. The film having the yield strength to the laser with which the threshold value is improved nearly double-fold is obtd. in such a manner.
Inventors:
YOSHIDA KUNIO
FUJITA HISANORI
OTANI MINORU
FUJITA HISANORI
OTANI MINORU
Application Number:
JP23945288A
Publication Date:
December 20, 1989
Filing Date:
September 22, 1988
Export Citation:
Assignee:
CANON KK
UNIV OSAKA
UNIV OSAKA
International Classes:
G02B5/08; G02B1/10; G02B1/115; G02B5/30; (IPC1-7): G02B1/10; G02B5/08; G02B5/30
Attorney, Agent or Firm:
Marushima Giichi
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