PURPOSE: To provide a process for production of the stamper master disk which is capable of forming a 2P resin replica without intruding and protruding of air bubbles, yields the 2P resin replica having good transferability without the danger of degrading flatness by deflection at the time of injecting the 2P resin into a cell and is much higher in injection rate than that in the conventional methods.
CONSTITUTION: A cell 4 formed by hermetically disposing an original mold 1 having rugged patterns and a substrate 2 opposite to each other via spacer materials 3, 3' at their peripheral edges and central parts is placed in a vacuum chamber 6 and the pressure in this chamber is reduced. An injection hole 5 is thereafter immersed in a photosetting resin 9 and the pressure in the chamber is increased to suck the photosetting resin 9 into the cell 4. The photosetting resin is thereafter irradiated with light to cure the photosetting resin, and the hardened resin replica of the original mold is obtd.
YUASA TOSHIYA
YOSHINO HITOSHI
KAMITAKAHARA HIROFUMI
KAI TAKASHI
SHIKAME OSAMU
KUSHIDA NAOKI
