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Patent Searching and Data


Title:
PRODUCTION OF STAMPER
Document Type and Number:
Japanese Patent JPH02185741
Kind Code:
A
Abstract:

PURPOSE: To obtain the stamper having good appearance by applying a resist to a prescribed thickness on a glass master disk and exposing the resist with a modulated laser, then putting only the extreme surface layer into the sensitized state over the entire surface of the resist.

CONSTITUTION: This production process consists of a stage for applying the resist to the prescribed thickness on the glass master disk, a stage for locally exposing the resist with the modulated laser, a stage for putting only the extreme surface layer of the resist into the sensitized state over the entire surface of the resist, a stage for applying a developing soln. and molding pits, a stage for forming an electrode film, and a stage for electroplating Ni, etc. The surface layer of the resist is reformed after laser cutting, by which the photosensitive layer is formed on the surface layer of the resist. Since the surface photosensitive layer is etched at the development of every photosensitive layer, the fit between the developing soln. and the resist is good and the stamper having the good appearance is formed.


Inventors:
SUGIMOTO MAMORU
Application Number:
JP323689A
Publication Date:
July 20, 1990
Filing Date:
January 10, 1989
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
B29D17/00; G11B7/26; (IPC1-7): B29D17/00; G11B7/26
Attorney, Agent or Firm:
Masanori Ueyanagi (1 outside)