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Title:
RECOVERY OF NOBLE GAS FROM CHAMBER
Document Type and Number:
Japanese Patent JP3913327
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a method for recovering a noble gas such as xenon, neon and krypton from a chamber.
SOLUTION: A noble gas selected from xenon, neon, krypton or a mixture thereof is recovered from a process chamber A by purging the process chamber A with one kind of some kinds of gases, and separating the noble gas from the purge gas by one of some methods. The separated noble gas is further purified to remove a trace of impurity and recycled to reuse the gas at the process chamber. The purge gas can be recycled or discharged according to the kind and purity of the purge gas. As a specific embodiment, hydrogen is used as the purge gas and separated from the noble gas by a high temperature membrane separation by using a palladium membrane. Each of the hydrogen (obtained in high purity) and the noble gas is recycled to reuse in the process chamber.


Inventors:
Rabbi Jain
Walter H. Whiterock
Application Number:
JP22333097A
Publication Date:
May 09, 2007
Filing Date:
August 20, 1997
Export Citation:
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Assignee:
THE BOC GROUP INCORPORATED
International Classes:
B01D53/22; B01D53/00; C01B23/00; F25J3/02; H01J9/50; (IPC1-7): C01B23/00; B01D53/22; H01J9/50
Domestic Patent References:
JP8236464A
Foreign References:
EP0727557A1
Attorney, Agent or Firm:
Kazuo Shamoto
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Shurin Sakurai