REGENERATING METHOD OF MEMBER USED FOR MANUFACTURING PERIODIC TABLE GROUP 13 METAL NITRIDE SEMICONDUCTOR CRYSTAL, AND MANUFACTURING METHOD OF PERIODIC TABLE GROUP 13 METAL NITRIDE SEMICONDUCTOR CRYSTAL

Title:

Document Type and Number:

Japanese Patent JP2013100207

Kind Code:

A

Abstract:

To solve the problem in which the members of a reaction vessel or the like used for manufacturing a periodic table group 13 metal nitride semiconductor crystal sometime progress changing in quality and/or deterioration by the use of repeating and/or for a long time, and are necessary to be exchanged, however that invites the increase of the production cost if exchanging frequently for a new member.

The member that has changed in quality and/or has been deteriorated is processed so that the color value (L* value) and/or the expansion coefficient may become numerical values of a given range, thereby the member can be regenerated so as to be reused for manufacturing the group 13 nitride semiconductor crystal.

Inventors:

SAITO TAKEYA
ITO SUMITAKA

Application Number:

JP2011245855A

Publication Date:

May 23, 2013

Filing Date:

November 09, 2011

Export Citation:

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Assignee:

MITSUBISHI CHEM CORP

International Classes:

C30B29/38; C30B19/06; H01L21/208

Attorney, Agent or Firm:

Yoshiyuki Kawaguchi
Hidemi Matsukura
Daisuke Takada
Shinichi Sanuki
Takeshi Niwa
Kaoru Kosaka
Toshiaki Shimoda

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