To provide a mechanical contact mechanism excellent in vibration resistance, frequency characteristic, and insulation by providing a fixed contact on the lower surface of the insulator substrate of a stationary-contact block in such a way that it faces the movable contact of a movable-contact block in such a manner that it can move into and out of contact with the movable contact.
A leading part 22a is plated with Au or Ag its end to form a movable contact 14, after which a recess 12 is formed by etching of a silicon wafer 11 to obtain a movable-contact block 10. A stationary-contact block 30 is stacked on the edge of the upper surface of the block 10 via a circular spacer that is quadrant on plan view, and a movable contact 14 is opposed to a fixed contact 32 at a predetermined contact-to-contact distance in such a way that it can move into and out of contact with the stationary contact. If no voltage are applied to driving electrodes 19, 20, a piezoelectric thin film 18 is not warped, and the contacts 14, 32 are separated. If voltages are applied to the electrodes 17, 20, the thin film 18 is warped with its upper surface projecting, and a movable piece 13 pushes up the contact 14, bringing the contact 14, 32 into contact to close an electric circuit.
HORIIKE SUMIO
OMI TOSHIHIKO
NAKANISHI YOICHI
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