Title:
走査型顕微鏡
Document Type and Number:
Japanese Patent JP6613219
Kind Code:
B2
Abstract:
A scanning microscope includes: a charged particle beam source configured to output a charged particle beam to be emitted to a sample; a detector configured to detect charged particles from the sample; and a controller configured to control the charged particle beam source and the detector, wherein the controller changes one or more variable parameters to determine a plurality of different parameter value sets, acquires a measurement result of a temporal change of absorption current in a target sample material under each of the plurality of different parameter value sets, and, based on the measurement results, selects a parameter value set for use in measurement of the target sample from the plurality of different parameter value sets.
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Inventors:
Ryoko Araki
Makoto Kim
Bizen Daisuke
Makoto Kim
Bizen Daisuke
Application Number:
JP2016171641A
Publication Date:
November 27, 2019
Filing Date:
September 02, 2016
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/28; G01N23/203; G01N23/2251; H01L21/66
Domestic Patent References:
| JP2012156026A | ||||
| JP2010103320A | ||||
| JP63313458A | ||||
| JP62019707A | ||||
| JP2005064128A | ||||
| JP2000275197A | ||||
| JP5062093A |
Attorney, Agent or Firm:
Fujio Patent Office