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Title:
SCHEDULE GENERATING METHOD FOR SUBSTRATE PROCESSING APPARATUS, AND SCHEDULE GENERATING PROGRAM
Document Type and Number:
Japanese Patent JP2015005613
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To generate a schedule for a single wafer type substrate processing apparatus, capable of processing a substrate with stable quality when an abnormality is generated or is even solved after the abnormality in the substrate processing apparatus.SOLUTION: A schedule generating method includes: a first step of generating a schedule by a control unit so that a preliminary processing step and a substrate processing step are performed in this order at a common processing unit; a second step of stopping the substrate processing step at the processing unit designated at the first step by the control unit when an abnormality is generated in a substrate processing apparatus during a period from starting of the preliminary processing step until before starting of the substrate processing step; and a third step of generating a schedule by the control unit so that, after the abnormality is solved, the preliminary processing step and the substrate processing step are performed in this order at the processing unit designated at the first step.

Inventors:
YAMAMOTO SHINKO
Application Number:
JP2013129867A
Publication Date:
January 08, 2015
Filing Date:
June 20, 2013
Export Citation:
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Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
H01L21/027; G11B5/84; H01L21/304
Domestic Patent References:
JP2013077796A2013-04-25
JP2011176117A2011-09-08
JP2011233721A2011-11-17
JP2009164256A2009-07-23
Foreign References:
US20130073069A12013-03-21
US20110208344A12011-08-25
US20110265813A12011-11-03
Attorney, Agent or Firm:
Kosaku Inaoka
Kawasaki Real husband
Masahide Yasuda



 
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