PURPOSE: To obtain a relatively inexpensive inertial sensor, e.g. an accelerometer or an oscillatory gyroscope, by overcoming numerous disadvantages of a conventional system.
CONSTITUTION: A resonator 10 comprises an appropriate substrate and formed in a central plate 50, interposed between upper and lower plates 51, 52. The central plate 50 may be a cut plate 51 and the upper and lower plates may be made of glass, quartz or fused silica in order to visually recognize the central plate. This arrangement allows centering of the resonator 10 and eigen frequency matching thereof by laser abrasion. The central plate 50 comprises an edge- fixing part for supporting the ring central resonator 10 with a series of L-rod posts. A conductive central substrate is coated uniformly with insulating silicon oxide or silicon nitrate.
DEI HOJINSU
TEI ESU NOORISU
ETSUCHI DEI TOOMASU
| JPS6073414A | 1985-04-25 | |||
| JPS6432113A | 1989-02-02 | |||
| JPH05502945A | 1993-05-20 |