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Title:
自己現像層形成ポリマーおよびその組成物
Document Type and Number:
Japanese Patent JP2014520935
Kind Code:
A
Abstract:
Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.

Inventors:
Onishi 治
Haruo Ikeda
Yoshio Tagashira
A rose, a rally
Can ダナラチチ, プラモド
Application Number:
JP2014520413A
Publication Date:
August 25, 2014
Filing Date:
July 16, 2012
Export Citation:
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Assignee:
Sumitomo Bakelite Co., Ltd.
Pro メラス and LLC
International Classes:
C08L63/00; C08F8/14; C08F222/06; C08F232/08; C08G59/42; C08L31/00; C08L45/00
Domestic Patent References:
JP2002504573A2002-02-12
JPH1010739A1998-01-16
JPH11305444A1999-11-05
JPH11124427A1999-05-11
JP2001302871A2001-10-31
JP2000330282A2000-11-30
JPS6234917A1987-02-14
JP2008506010A2008-02-28
JP2002327021A2002-11-15
JP2002504573A2002-02-12
JPH1010739A1998-01-16
JPH11305444A1999-11-05
JPH11124427A1999-05-11
JP2001302871A2001-10-31
JP2000330282A2000-11-30
JPS6234917A1987-02-14
Foreign References:
WO2011002516A22011-01-06
WO2001079325A12001-10-25
WO2011002516A22011-01-06
WO2001079325A12001-10-25
Attorney, Agent or Firm:
Ono Shinjiro
Kobayashi 泰
Shigeo Takeuchi
Yamamoto 修
Takumi Terachi



 
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