Title:
SELFFCLEANING TYPE PREPARATION OF SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPS52117071
Kind Code:
A
Abstract:
PURPOSE:To prepare a semiconductor by a self-cleaning action by disposing a plasmagenerating means adjacent the opposite ends of a vapor phase growth furnace.
Inventors:
YOSHIMI TAKEO
SAKAI HIDEO
SUGAWARA KATSUO
SAKAI HIDEO
SUGAWARA KATSUO
Application Number:
JP3362776A
Publication Date:
October 01, 1977
Filing Date:
March 29, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/302