Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6219224
Kind Code:
B2
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Inventors:
Hisami Suzuki
Application Number:
JP2014087027A
Publication Date:
October 25, 2017
Filing Date:
April 21, 2014
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L29/73; H01L21/331; H01L21/336; H01L21/8249; H01L27/06; H01L29/78
Domestic Patent References:
JP3044937A | ||||
JP2263473A | ||||
JP2008520088A | ||||
JP2215158A |
Attorney, Agent or Firm:
Shinji Hayami
Satoshi Amagi
Satoshi Amagi