Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH1154576
Kind Code:
A
Abstract:
To provide a semiconductor device in which a state of conduction between the electrode pad of a characteristics measuring circuit and a measuring terminal can be determined prior to measurement.
A characteristics measuring circuit 12 comprising a plurality of elements provided independently from a main circuit having the function as a product is formed on a substrate 11. The characteristics measuring circuit 12 is provided with a plurality of electrode pads 13, 14 insulated electrically from the substrate 11 wherein each electrode pad 13, 14 is provided with an auxiliary electrode pad 15, 16.
Inventors:
NAGAYASU KATSUYUKI
Application Number:
JP20943697A
Publication Date:
February 26, 1999
Filing Date:
August 04, 1997
Export Citation:
Assignee:
NEC YAMAGUCHI LTD
International Classes:
H01L21/66; G01R31/28; (IPC1-7): H01L21/66; G01R31/28
Domestic Patent References:
| JPS61281564A | 1986-12-11 | |||
| JPS6370581A | 1988-03-30 |
Attorney, Agent or Firm:
Masatake Shiga