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Patent Searching and Data


Title:
SIGNAL PROCESSOR FOR CHECKING PATTERN DEFECT
Document Type and Number:
Japanese Patent JPS5835407
Kind Code:
A
Abstract:

PURPOSE: To increase the accuracy in pattern measurement, by comparing a compensation measuring signal, which is obtained by subtracting a signal extracted in a low frequency filter from the defect data signal of the pattern whose phase is adjusted by a space filtering method, with a threshold signal.

CONSTITUTION: The laser light signal of the defect of the regular pattern by the space filtering method is transduced into an electric signal by a photoelectric transducer 501 and branched through an amplifier 502. One output is inputted into a comparator 505 through the buffer amplifier 503 and a phase adjusting circuit 504, wherein the phase is adjusted. The other output is inputted into the comparator 505 through the low pass filter 506 and an adding circuit 507, and subtraction for both signals is performed. The difference signal is compared with the threshold signal which is inputted from a reference voltage circuit 508 through the adding circuit 507, and the defect signal 509 is outputted. In this way, the causes of the degradation of the measuring accuracy such as fluctuation in the photoelectric transducer 501 and secular change are alleviated and the accuracy in the pattern measurement is improved.


Inventors:
SUGIZAKI KENNOSUKE
MUKASA SHIYUNSUKE
Application Number:
JP1981000135087
Publication Date:
March 02, 1983
Filing Date:
August 28, 1981
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
H01J9/42; G01B11/24; G01B21/20; G01N21/956; H01J9/14; (IPC1-7): G01B11/24; G01B21/20; H01J9/42; H01J29/07
Domestic Patent References:
JPS56135088A1981-10-22
JPS54162592A1979-12-24