Title:
SMALL-SIZED HORIZONTAL THREE-FREEDOM VIBRATION APPARATUS
Document Type and Number:
Japanese Patent JPH01129129
Kind Code:
A
Abstract:
PURPOSE:To reduce an area required for setting a vibration apparatus, by setting a load supporting means, a horizontal direction guide means and a vibration means under a table. CONSTITUTION:A vibration-receiving block 2a shaped in a rectangular parallelepiped is provided in projection on the base side of a table 2'. Three pairs of hydraulic cylinder means 1-1-1-6 have a function of bearing the table 2' and the weight of a load thereon, a function of vibrating a table 2 through the vibration-receiving block 2a and a function of guiding the table 2 in the directions of X and Y through the vibration-receiving block 2a. These means are driven by servo valves 3-1-3-3. Since the hydraulic cylinder means 1-1-1-6 are accommodated in a space under the table 2, an area required for setting the whole of a vibration apparatus can be made equal substantially to the area of the table 2'.
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Inventors:
KATO AKIRA
FUJIWARA KOJI
FUJIWARA KOJI
Application Number:
JP28727187A
Publication Date:
May 22, 1989
Filing Date:
November 16, 1987
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01M7/02; G01M7/00; (IPC1-7): G01M7/00
Attorney, Agent or Firm:
Masami Akimoto