To make it possible to improve the accuracy of a spacer layer by supplying a UV curing resin between a rotary stamper and a first reflection layer and rotating a substrate and the rotary stamper at the time of crushing this resin between the substrate and the rotary stamper.

The UV curing resin 103a is successively diffused from the central side toward the outer periphery side by a centrifugal force and the prescribed size is eventually obtd. gradually from the central side when the substrate and the rotary stamper are rotated while the UV curing resin 103a is held therebetween. The UV curing resin may, thereupon, be cured successively by gradually irradiating the resin with the UV rays from the part where the size accuracy on the central side is obtd. by moving a UV nozzle 24 from the central side toward the outer periphery side. Namely, the immediate curing of the part where the accuracy is obtd. is possible in the state that this accuracy is obtd. and, therefore, the deviation in the accuracy is eventually obviated.