SPECTRAL TRANSMISSION MEASUREMENT DEVICE AND SPECTRAL TRANSMISSION MEASUREMENT METHOD

Japanese Patent JP2015094628

A

PROBLEM TO BE SOLVED: To enable suppression of fall-off in amount of light of a measurement ray flux for use in a spectral measurement even with a sample having a refractive power in spectral transmission measurement devices, and to enable improvement in measurement accuracy.SOLUTION: A spectral transmission measurement device 20 comprises: a light source part 16; a collimator lens 4 that forms a measurement ray flux L2; a sample holding part 15; an optical system that includes an objective lens 6 converging the measurement ray flux L2 passing through a measurement sample 5 and an image formation lens 9; a drive stage 7 that moves a front-side focus position; an incident aperture 10a that is disposed at a converging position by a second optical system; a spectrometer 10 that acquires spectral intensity data; a measurement control unit that moves the second optical system and acquires a plurality of spectral intensity data; and a computation processing unit that calculates light intensity data for each wavelength on the basis of a change in the plurality of spectral intensity data. Spectral transmission of the measurement sample 5 is adapted to be calculated using the light intensity data.

SUZUKI AKITOMO

JP2013233318A

May 18, 2015

November 11, 2013

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OLYMPUS CORP

G01N21/27

Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
Shiro Suzuki
Hiroyuki Hashimoto

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