Title:
SPIN CASTABLE MIXTURE USEFUL FOR FORMING CONTRAST INCREASING LAYER FOR FAR ULTRAVIOLET RAY
Document Type and Number:
Japanese Patent JPH0250162
Kind Code:
A
Abstract:
PURPOSE: To ensure superior declaring characteristics by incorporating 100 pts.wt. inert solvent, 2-20 pts.wt. inert org. binder and 2-20 pts.wt. specified α-alkyl-N-alkylnitron.
CONSTITUTION: One hundred pts.wt. inert solvent, 2-20 pts.wt. inert org. binder and 2-20 pts.wt. specified α-alkyl-N-alkylnitron represented by formula I are incorporated. In the formula I, R is H or 1-8C alkyl, X is H or a univalent electron attractive group selected from among carboalkoxy, acyl and oxirane and Y is H or a univalent aliphatic group. Superior decoloring characteristics can be ensured.
Inventors:
GEIRII CHIYAARUZU DEIBISU
Application Number:
JP19259088A
Publication Date:
February 20, 1990
Filing Date:
August 01, 1988
Export Citation:
Assignee:
HARUZU AMERICA INC
International Classes:
G03F7/09; G03F7/26; G03F7/095; G09B9/32; H01F1/153; H01L21/027; H01L21/30; (IPC1-7): G03F7/095; H01L21/027
Domestic Patent References:
| JPS6269259A | 1987-03-30 | |||
| JPS61180242A | 1986-08-12 | |||
| JPS61121050A | 1986-06-09 | |||
| JPS62223157A | 1987-10-01 | |||
| JPS6352129A | 1988-03-05 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Next Patent: JPH0250163