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Patent Searching and Data


Title:
SPINNING DRYER AND APPARATUS FOR POLISHING OUTER PERIPHERY OF WAFER
Document Type and Number:
Japanese Patent JP2003332293
Kind Code:
A
Abstract:

To provide a spinning dryer in which wafer holding is surely and safely canceled without providing a complicated and expensive detector and without substantially requiring maintenance in the spinning dryer of a centrifugal force clamp type.

When moving a turn table 73 to the upside of a scatter-proofing cover 75 in order to load/unload a work W to/from the spinning dryer, a part of the scatter-proofing cover 75 is abutted with a turn hook member 74 and turns the hook member to forcibly disengage the hook member.


Inventors:
HIRATA KAZUHIKO
Application Number:
JP2002142153A
Publication Date:
November 21, 2003
Filing Date:
May 16, 2002
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B9/00; F26B5/08; H01L21/304; (IPC1-7): H01L21/304; B24B9/00; F26B5/08
Attorney, Agent or Firm:
Amano Masakage (1 person outside)