Title:
【発明の名称】ステージ可動支持装置
Document Type and Number:
Japanese Patent JP2997273
Kind Code:
B2
Inventors:
Yoshikazu Fujino
Application Number:
JP13267989A
Publication Date:
January 11, 2000
Filing Date:
May 29, 1989
Export Citation:
Assignee:
Seibu Electric Co., Ltd.
International Classes:
G12B5/00; B23Q1/25; B23Q1/26; B23Q1/38; H01L21/027; H01L21/30; H01L21/68; H02K44/00; (IPC1-7): B23Q1/25; G12B5/00; H01L21/68; H02K44/00
Domestic Patent References:
| JP62277503A | ||||
| JP62207165A | ||||
| JP62114840A | ||||
| JP50138246A |
Attorney, Agent or Firm:
Ismune Onaka