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Title:
STATIC ELIMINATOR AND STATIC ELIMINATION METHOD
Document Type and Number:
Japanese Patent JP2020077606
Kind Code:
A
Abstract:
To provide a static eliminator that does not need to have a high vacuum region and a low vacuum region in order to prevent the device from becoming large in size for a charged object that requires high vacuum processing.SOLUTION: A static eliminator is provided with a high vacuum chamber with an internal pressure of 10-5 Pa or more and 1 Pa or less, in which a charged object that requires high vacuum processing can be installed inside, and a plasma generator including a plasma source for supplying plasma by electron cyclotron resonance inside the vacuum chamber to suppress an increase in size of the device.SELECTED DRAWING: Figure 1

Inventors:
NOMURA NOBUO
MOGAMI TOMOFUMI
MINEMURA KAZUKI
KODA DAIKI
MORISHITA TAKATO
HOSODA SATOSHI
KUNINAKA HITOSHI
Application Number:
JP2019151410A
Publication Date:
May 21, 2020
Filing Date:
August 21, 2019
Export Citation:
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Assignee:
KASUGA ELECTRIC CO
NAT RES & DEVELOPMENT AGENCY JAPAN AEROSPACE EXPLORATION AGENCY
International Classes:
H05F3/06; C23C14/20; H05H1/46
Attorney, Agent or Firm:
Sumio Tanai
Hiroyuki Hashimoto
Hiroshi Yamaguchi
Takeo Okita
Norihiko Ara