Title:
SUBSTRATE CLEANING APPARATUS
Document Type and Number:
Japanese Patent JP3539864
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate cleaning apparatus for detecting a load of a cleaning tool surely and accurately.
SOLUTION: A load cell for detecting a load of a cleaning brush applied to the substrate is put below a pendulous part of a brush holding member for holding a cleaning brush. During an adjustment time for cleaning brush load detection, the cleaning brush is put in contact with a load measuring instrument, by which the substrate is replaced, and then the load cell detects a load applied from the pendulous part as a load of the cleaning brush, and a detection signal is generated. The detection signal is amplified by a load cell amplifier and a load is calculated and displayed as a brush load on a display unit 12. At the same time, the amplified signal from the load cell amplifier is displayed on an analog-number column 20. The output value of load cell can be confirmed directly by an operator.
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Inventors:
Kazuhiro Takahashi
Yuichi Kago
Yuichi Kago
Application Number:
JP10304898A
Publication Date:
July 07, 2004
Filing Date:
April 14, 1998
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B08B1/04; H01L21/304; G01L5/00; (IPC1-7): H01L21/304; B08B1/04; G01L5/00
Domestic Patent References:
| JP9326378A | ||||
| JP7027637A | ||||
| JP6069850U |
Attorney, Agent or Firm:
Yoshito Fukushima