Title:
SUBSTRATE HANDLING DEVICE
Document Type and Number:
Japanese Patent JP2004015022
Kind Code:
A
Abstract:
To provide a substrate handling device in which the design of a substrate carrying passage is set freely and a mutual influence between treatment sections through the substrate carrying passage is reduced.
An arm base provided in each of carrying mechanisms 17-21, 23 and 24 is arranged to turn about a z-axis and to elevate/lower in the z-axis direction, and each arm is arranged to advance/retract in the radial direction of rotation. Passages for carrying substrates, i.e. treatment section carrying passages 25 and 26, are installed on respective floors by interposing heat treatment sections 16 (16A-16H) and juxtaposing the carrying mechanisms 17-21, 23 and 24 on the same horizontal plane.
Inventors:
SUGIMOTO KENJI
MATSUNAGA SANENOBU
SANADA MASAKAZU
YOSHIOKA KATSUJI
AOKI KAORU
YANO MORITAKA
YAMAMOTO SATOSHI
MIHASHI TAKESHI
NAGAO TAKASHI
KODAMA MITSUMASA
MATSUNAGA SANENOBU
SANADA MASAKAZU
YOSHIOKA KATSUJI
AOKI KAORU
YANO MORITAKA
YAMAMOTO SATOSHI
MIHASHI TAKESHI
NAGAO TAKASHI
KODAMA MITSUMASA
Application Number:
JP2002170500A
Publication Date:
January 15, 2004
Filing Date:
June 11, 2002
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
B25J9/06; B65G49/07; H01L21/027; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J9/06; B65G49/07; H01L21/027
Attorney, Agent or Firm:
Tsutomu Sugiya