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Title:
SUBSTRATE HEATING FURNACE
Document Type and Number:
Japanese Patent JP2012028544
Kind Code:
A
Abstract:

To provide a substrate heating furnace which simultaneously heats multiple substrates while cooling a furnace core tube.

A furnace core tube 11 is formed by a ceramic which transmits infrared ray. A substrate 12 is held by a substrate holding part 13 so as to face an inner peripheral side surface of the furnace core tube 11, and infrared ray is radiated from a lamp heating heater 15 disposed between the furnace core tube 11 and a reflector 14 to the substrate 12 to heat the substrate. The reflector 14 is located in a position which is spaced apart from an outer peripheral side surface of the furnace core tube 11 so as to enclose the outer peripheral side surface of the furnace core tube 11. A ventilation part 17 blows a fluid such as air, which transmits the infrared ray, through a flow passage 19 located between the furnace core tube 11 and the reflector 14 to cool the furnace core tube 11.


Inventors:
SUZUKI YASUMASA
SHIMIZU SABURO
TEZUKA KAZUO
Application Number:
JP2010000165500
Publication Date:
February 09, 2012
Filing Date:
July 23, 2010
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
H01L21/31
Domestic Patent References:
JP2003059842A2003-02-28
JPH02241029A1990-09-25
JPS6471117A1989-03-16
JPH03245524A1991-11-01
JPS61147521A1986-07-05
JP2007066934A2007-03-15
JPH04503736A1992-07-02
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe