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Title:
SUBSTRATE HOLDER AND METHOD FOR MANUFACTURING OPTICAL COMPONENT USING THE SAME
Document Type and Number:
Japanese Patent JP2002097572
Kind Code:
A
Abstract:

To provide a substrate holder which improves productivity even when a film is formed only on one side of an optical component.

The substrate holder 9 for holding the optical component, in forming an optical thin film on an optical function side of the optical component with a film forming apparatus, comprises a first substrate holder 14 which decides a film-forming region for the optical function side of a first concave lens 12 of an optical component, in a substrate chamber 10, and holds the concave lens 12 from the film-forming region side, a second substrate holder 15 which decides a film-forming region for the optical function side of a second concave lens 13, and holds the concave lens 13 from the film-forming region side, a third substrate holder 16 which is interposed between the first substrate holder 14 and the second substrate holder 15, and which holds the concave lens 12 and lens 13 from an opposite side of the each film-forming region, and a retainer which integratedly holds the first to the third substrate holder, 14, 15, and 16.


Inventors:
WATANABE TADASHI
KAWAMATA TAKESHI
TOYOHARA NOBUYOSHI
DEGUCHI TAKESHI
Application Number:
JP2000000288392
Publication Date:
April 02, 2002
Filing Date:
September 22, 2000
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G02B7/00; C23C14/50; G02B1/11; G02B3/00; (IPC1-7): C23C14/50; G02B1/11; G02B3/00; G02B7/00
Domestic Patent References:
JPH1068064A1998-03-10
JPH05270997A1993-10-19
JPH05271924A1993-10-19
JPH05106046A1993-04-27
JPH0625358U1994-04-05
Attorney, Agent or Firm:
奈良 武