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Title:
SUBSTRATE HOLDING MEMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2014056865
Kind Code:
A
Abstract:

To perform drying in a short time while preventing poor drying, by guiding droplets thereby preventing accumulation of droplets at the lower edge of a substrate.

Droplets LQ flowing down the peripheral portion of a substrate W, from the right and left peripheral portions thereof toward the lower central part of the substrate W, and accumulating between the peripheral portion of a substrate W and a holding portion 21 are guided so as to be sucked by an inclination droplet guidance part 29 and removed. Since accumulation of the droplets LQ between the peripheral portion of the substrate W and the holding portion 21 can be prevented, drying time can be shortened while preventing poor drying.


Inventors:
MIYAMAWARI HIDEAKI
HONSHO KAZUHIRO
AIHARA TOMOAKI
Application Number:
JP2012000199408
Publication Date:
March 27, 2014
Filing Date:
September 11, 2012
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
H01L21/683; H01L21/304
Domestic Patent References:
JPH0849073A1996-02-20
JP2001102432A2001-04-13
JP2004319783A2004-11-11
JPS5234859B21977-09-06
JPH0652982U1994-07-19
JP3714763B22005-11-09
JP2012073068A2012-04-12
JP2007276443A2007-10-25
JPH0849073A1996-02-20
JP2001102432A2001-04-13
JP2004319783A2004-11-11
JPS5234859B21977-09-06
JPH0652982U1994-07-19
Attorney, Agent or Firm:
杉谷 勉
戸高 弘幸
杉谷 知彦
栗原 要