SUBSTRATE PROCESSING APPARATUS - DAINIPPON SCREEN MFG

Title:

SUBSTRATE PROCESSING APPARATUS

Document Type and Number:

Japanese Patent JP2005093920

Kind Code:

A

Abstract:

To provide a substrate processing apparatus that can obtain a high throughput by improving transport efficiency.

An inspection block which inspects a development-processed substrate is incorporated in the substrate processing apparatus which performs a resist applying process and development process. In the inspection block, an inspection unit which performs inspections of a prescribed content and a transport robot which receives and delivers the substrate from and to the inspection unit are loaded. When a substrate to be inspected is carried in the inspection block, the transport robot carries the substrate to the inspection unit. When a substrate not to be inspected is carried in the inspection block, the transport robot carries the substrate to the outlet of the block as it is. In this case, it is permitted that a succeeding substrate not to be inspected gets ahead of a preceding substrate to be inspected in the inspection block.

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Inventors:

SHIGA MASAYOSHI
HAJIKI KENJI
KOYAMA YASUFUMI

Application Number:

JP2003328501A

Publication Date:

April 07, 2005

Filing Date:

September 19, 2003

Export Citation:

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Assignee:

DAINIPPON SCREEN MFG

International Classes:

B05C11/00; H01L21/00; H01L21/027; G03F7/30; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; G03F7/30; H01L21/027

Attorney, Agent or Firm:

Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita

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