Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP4842746
Kind Code:
B2
Inventors:
Nobuo Fujisaki
Application Number:
JP2006254159A
Publication Date:
December 21, 2011
Filing Date:
September 20, 2006
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
H01L21/677; B65G13/00; B65G49/06
Domestic Patent References:
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Attorney, Agent or Firm:
Kunio Ueda
Noriharu Fujita
Noriharu Fujita