Title:
Substrate transport device
Document Type and Number:
Japanese Patent JP6249999
Kind Code:
B2
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Inventors:
Katsuhiko Shiboshi
Akinori Iso
Ryuhei Takahara
Akinori Iso
Ryuhei Takahara
Application Number:
JP2015139098A
Publication Date:
December 20, 2017
Filing Date:
July 10, 2015
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B65G49/06; B65G13/00; B65G39/18; H01L21/677
Domestic Patent References:
| JP10181839A | ||||
| JP56138219U | ||||
| JP2007227634A | ||||
| JP11011364A | ||||
| JP10250812A |
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